ナノプローバー

Nano Probing

Nano probing becomes indispensable with scaling down in technology node. Hyperion (Multiprobe) is capable of doing transistor level, single device characterizations down to 10 nm. This scanning probe, AFM based, nano prober with tapping mode imaging facility provides accurate data, free of e-beam charging degradation, and pico-current imaging  to reveal electrical failure in IC circuits clearly.

Features

l   Capable to 10nm technology node

l   Capable to 10nm technology node

l   Tungsten tips

l   Contact resistance < 30 Ohm

l    Device level accuracy over 200 micron range

l   Ultra low drift probing <1nm/min

l   Nitrogen purged environmental enclosure

 

Advantages

l   Ultimate resolution

l   No e-beam biasing of transistors

l   Avoids direct contact of probe/sample during scan  -> longer tip life & no sample damage issue

l   Force feedback

l   Conductive AFM with 5pA sensitivity

l   Measures dopant concentrations in Si

l   Sub-10 nm lateral resolution

l   Measurements at elevated temperature

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uContact technical window:

     Mr. Yen     TEL: +886-3-6116678 ext. 3101   E-mail: nanoprobe@ma-tek.com