Field Emission Auger Electron Spectroscopy (FE-AES) Service

Field Emission Auger Electron Spectroscopy (FE-AES) Service

The new surface analysis instrument - JEOL JAMP-9500F is a high performance system of Field Emission Auger Electron Spectroscopy (FE-AES). Its energy resolution can reach to 0.05% by using Hemi-Sphere Analyzer (HSA). With the field emission electron source, it is able to observe high quality of SEM image with 3nm resolution and AES mapping with 8nm. It is a surface sensitive analysis technique with 5-8nm detection depth. This system is able to provide qualitative and semi-quantitative analysis. Besides surface analysis, depth profiling can be done with ion sputtering to investigate inter-diffusion and thin film thickness. It is good for periodic monitoring of surface contamination/residue. According to the database, it is able to provide chemical state information, especially for transition metals. The chemical states change can be measured by depth profile as well.





Application

  • Auger multi-points analysis
  • AES depth profiling analysis
  • AES mapping analysis
  • Monitoring surface cleanliness of samples
  • Chemical state analysis
  • Quantitative compositional analysis of the surface of specimens
  • mpurity analysis (D.L. 0.1 at%)

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